Furnaces for Graphite Purification and Coating

These are COV furnaces, which means that they feature heaters and thermal insulation made from graphite or fiber-reinforced graphite. They are electrically heated batch systems for high-temperature processes.

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Graphite Purification and Coating Furnaces

  • Furnaces for Graphite Purification

    The batch is first cleaned at high temperature in a vacuum. Volatile components are thermally expelled in this process. Further treatment uses halogenated gases to ensure that chlorine and fluorine are available in the process as effective reactants. The typical maximum process temperature is 2,200 °C but can reach 2,400 °C in isolated cases.

    These extreme process conditions require maximum safety consideration and precise knowledge of the exact properties of the materials used.

    The materials and components used are selected with the reactive atmosphere in mind to ensure the longest possible service life for the system.

    The process gases used and the products of their reactions necessitate aftertreatment of the exhaust gases to ensure compliance with the limits of standards such as the German TA Luft air quality regulation. This aftertreatment is generally performed by a gas scrubber. Batch handling facilities adapted to the systems complete the overall package of services.

  • Furnaces for Graphite Coating

    To coat graphite components, precursors are introduced into the reaction chamber, sometimes needing to be metered in liquid form. These precursors break down into reactive components in the reaction chamber, and these components are then deposited on the components as functional coatings in the conditions of the furnace atmosphere. The process temperatures generally reach as high as 1,800 °C.

    Successful coating processes call for careful consideration of the temperature profile in the effective space as well as the gas flows and the location-dependent temperatures in the process gas.

    The process gases used and the products of their reactions necessitate aftertreatment of the exhaust gases to ensure compliance with the limits of standards such as the German TA Luft air quality regulation. This aftertreatment is generally performed by a gas scrubber.

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PVA Industrial Vacuum Systems GmbH
Im Westpark 10–12
35435 Wettenberg, Germany

Phone: +49 (641) 68690-140/-141
Fax: +49 (641) 68690-822